Experimental clarification of orientation dependence of germanium PMOSFETs with Al₂O₃/GeO_x/Ge gate stack

【摘要】 An extensive and complete experimental investigation with a full layout design of the channel direction was carried out for the first time to clarify the orientation dependence of germanium p-channel metal–oxide–semiconductor field-effect transistors(PMOSFETs). By comparison of gate trans-conductance, drive current, and hole mobility, we found that the performance trend with the substrate orientation for Ge PMOSFET is(110)>(111) ～(100), and the best channel direction is(110)/[110]. Moreover, the(110) device performance was found to be easily degraded as the channel direction got off from the [110] orientation, while(100) and(111) devices exhibited less channel orientation dependence. This experimental result shows good matching with the simulation reports to give a credible and significant guidance for Ge PMOSFET design.更多还原

【Abstract】 An extensive and complete experimental investigation with a full layout design of the channel direction was carried out for the first time to clarify the orientation dependence of germanium p-channel metal–oxide–semiconductor field-effect transistors(PMOSFETs). By comparison of gate trans-conductance, drive current, and hole mobility, we found that the performance trend with the substrate orientation for Ge PMOSFET is(110)>(111) ～(100), and the best channel direction is(110)/[110]. Moreover, the(110) device performance was found to be easily degraded as the channel direction got off from the [110] orientation, while(100) and(111) devices exhibited less channel orientation dependence. This experimental result shows good matching with the simulation reports to give a credible and significant guidance for Ge PMOSFET design.更多还原