A self-consistent fluid model is employed to investigate the coagulation stage of nanoparticle formation, growth,charging, and transport in a radio-frequency capacitively coupled parallel-plate acetylene(C2H2) discharge. In our simulation, the distribution of neutral species across the electrode gap is determined by mass continuity, momentum balance, and energy balance equations. Since a thermal gradient in the gas temperature induced by the flow of the neutral gas, a careful study of the thermophoretic for...
【英文摘要】
A self-consistent fluid model is employed to investigate the coagulation stage of nanoparticle formation, growth,charging, and transport in a radio-frequency capacitively coupled parallel-plate acetylene(C2H2) discharge. In our simulation, the distribution of neutral species across the electrode gap is determined by mass continuity, momentum balance, and energy balance equations. Since a thermal gradient in the gas temperature induced by the flow of the neutral gas, a careful study of the thermophoretic for...
【基金】
Project supported by the China Postdoctoral Science Foundation(Grant No.2012M511603);
the National Natural Science Foundation of China(Grant Nos.11105057 and 10775025);
the Fundamental Research Funds for the Central Universities of China(Grant No.DUT12LK39)
【更新日期】
2014-08-29
【分类号】
TB383.1
【正文快照】
1.IntroductionRadio-frequency(RF)powered plasma-enhanced chemi-cal vapor deposition(PECVD)is often used to deposit hydro-genated amorphous carbon a-C:H thin films,which are appliedin tribological materials,[1,2]passivation layers,[3]and fieldemission cold
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