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Influences of nitrogen flow rate on the structures and properties of Ti and N co-doped diamond-like carbon films deposited by arc ion plating  
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【英文篇名】 Influences of nitrogen flow rate on the structures and properties of Ti and N co-doped diamond-like carbon films deposited by arc ion plating
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【作者】 张林; 马国佳; 林国强; 马贺; 韩克昌;
【英文作者】 Zhang Lin; Ma Guo-Jia; Lin Guo-Qiang; Ma He; Han Ke-Chang; Key Laboratory for Material Modification by Laser; Ion and Electron Beams; Dalian University of Technology; Science and Technology on Power Beam Processes Laboratory; Beijing Aeronautical Manufacturing Technology Research Institute;
【作者单位】 Key Laboratory for Material Modification by Laser; Ion and Electron Beams; Dalian University of Technology; Science and Technology on Power Beam Processes Laboratory; Beijing Aeronautical Manufacturing Technology Research Institute;
【文献出处】 Chinese Physics B , 中国物理B, 编辑部邮箱 2014年 04期  
期刊荣誉:ASPT来源刊  CJFD收录刊
【英文关键词】 arc ion plating; Ti–C–N film; nitrogen flow rate; microstructure;
【摘要】 In this paper, Ti–C–N nanocomposite films are deposited under different nitrogen flow rates by pulsed bias arc ion plating using Ti and graphite targets in the Ar/N2mixture gas. The surface morphologies, compositions, microstructures,and mechanical properties of the Ti–C–N films are investigated systematically by field emission scanning electron microscopy(FE-SEM), x-ray photoelectron spectroscopy(XPS), grazing incident x-ray diffraction(GIXRD), Raman spectra,and nano-indentation. The results show that the ...
【英文摘要】 In this paper, Ti–C–N nanocomposite films are deposited under different nitrogen flow rates by pulsed bias arc ion plating using Ti and graphite targets in the Ar/N2mixture gas. The surface morphologies, compositions, microstructures,and mechanical properties of the Ti–C–N films are investigated systematically by field emission scanning electron microscopy(FE-SEM), x-ray photoelectron spectroscopy(XPS), grazing incident x-ray diffraction(GIXRD), Raman spectra,and nano-indentation. The results show that the ...
【基金】 Project supported by the National Natural Science Foundation of China(Grant No.51271047)
【更新日期】 2014-05-28
【分类号】 O484.4
【正文快照】 1.Introduction Ti-based compounds such as TiN,TiC,and TiCN filmshave been successfully applied to various tools and dies dueto their superior mechanical properties in past decades.[1–3]In recent years,some researchers have synthesized Ti–C–N nanocompos

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