Influences of nitrogen flow rate on the structures and properties of Ti and N co-doped diamond-like carbon films deposited by arc ion plating   推荐 CAJ下载
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【英文篇名】
Influences of nitrogen flow rate on the structures and properties of Ti and N co-doped diamond-like carbon films deposited by arc ion plating
In this paper, Ti–C–N nanocomposite films are deposited under different nitrogen flow rates by pulsed bias arc ion plating using Ti and graphite targets in the Ar/N2mixture gas. The surface morphologies, compositions, microstructures,and mechanical properties of the Ti–C–N films are investigated systematically by field emission scanning electron microscopy(FE-SEM), x-ray photoelectron spectroscopy(XPS), grazing incident x-ray diffraction(GIXRD), Raman spectra,and nano-indentation. The results show that the ...
【英文摘要】
In this paper, Ti–C–N nanocomposite films are deposited under different nitrogen flow rates by pulsed bias arc ion plating using Ti and graphite targets in the Ar/N2mixture gas. The surface morphologies, compositions, microstructures,and mechanical properties of the Ti–C–N films are investigated systematically by field emission scanning electron microscopy(FE-SEM), x-ray photoelectron spectroscopy(XPS), grazing incident x-ray diffraction(GIXRD), Raman spectra,and nano-indentation. The results show that the ...
【基金】
Project supported by the National Natural Science Foundation of China(Grant No.51271047)
【更新日期】
2014-05-28
【分类号】
O484.4
【正文快照】
1.Introduction Ti-based compounds such as TiN,TiC,and TiCN filmshave been successfully applied to various tools and dies dueto their superior mechanical properties in past decades.[1–3]In recent years,some researchers have synthesized Ti–C–N nanocompos