【摘要】 考虑到光刻机E-PIN升降机构吸附硅片做上下往复运动,准确定位、快速性、稳定性的要求,提出了一种基于DSP和FPGA的升降机构控制系统设计和实现方法。以TI公司的DSP2812为控制器,Altera公司的EP3C25E144C3N作为可编程逻辑器件,设计了信号采集模块,规划了控制系统的整体框架,定义了通信传输协议。详细介绍了控制系统的运动控制模块、传感器模块、驱动电路、音圈电机执行机构等方面的设计。通过实验证明,该控制系统运行可靠,准确性、稳定性达到要求。更多还原

【Abstract】 Considering the lithography E-PIN lifting mechanism adsorbing silicon doing up and down reciprocating motion,accurate positioning,speediness and stability requirements,this paper proposes the design and implementation method of a hoist control system based on DSP and FPGA. Using DSP2812 of TI company as the controller,Altera company EP3C25E144C3N as programmable logic devices,design signal acquisition hardware module,planning the overall framework of the control system,define the protocol of communication and transportation to the collected signals. Introduced the control system of the motion control module,sensor module,drive circuit,the design of voice coil motor actuators,etc. Design of control system was proved by experiments and reliable operation,accuracy,stability,meet the requirements.更多还原