【摘要】 以电子辅助热丝化学气相沉积(Electron-assisted Chemical Vapor Deposition,EACVD)一体化系统为研究对象,根据金刚石沉积过程中对衬底温度的要求,设计了模糊PID衬底温度控制系统。使用结果表明:该系统对化学气相沉积(CVD)金刚石的衬底温度参数控制精确,能够长时间稳定运行,可以制备出高质量的CVD金刚石涂层。更多还原

【Abstract】 According to the requirement for the temperature in the deposition of the diamond,a fuzzy-PID compound control method was established in the integration Electron-Assisted Chemical Vapor Deposition( EACVD) system. The experiment of CVD diamond deposition shows that the process parameters can be accurately controlled and the system can apply stable long-term operation. It can be used for the deposition of high quality CVD diamond coating.更多还原