【摘要】 本文设计了具有类椭圆函数非对称响应的太赫兹窄带带通滤波器。滤波器由两个椭圆柱形谐振腔组成,并采用侧壁激励的方式,中心频率分别在0.88THz和1.041THz。鉴于传统机械加工工艺已经无法满足该频段滤波器的加工要求,硅基微机械加工工艺被用来完成两个滤波器的加工工作。使用商用全波电磁仿真软件Ansoft HFSS仿真,结果显示滤波器相对带宽分别为0.77%和0.75%。本文设计的滤波器具有结构简单,紧凑,易于加工等优势。文中还对微机械工艺可能对滤波器性能带来的影响进行了分析。更多还原

【Abstract】 In this letter, a terahertz(THz) narrow-band band-pass filter with pseudo-elliptical asymmetric response has been designed. The filter contains two elliptic cavity resonators and it is excited through side-wall coupling. The center frequencies of filters are at 0.88 THz and 1.041 THz. Because traditional machining techniques can not satisfy requirements, silicon machining techniques are used to fabricate proposed filters. From the simulated results using Ansoft HFSS, the relative bandwidths of filters are 0.77% and 0.75% respectively. The proposed filters are simple, compact and capable of achieving a high degree of integration on a single chip. Effects of micromachining process on the filter?s performance are discussed in detail in this letter.更多还原