【摘要】 针对步进光刻机工作台对高精度定位信息的高速实时采集要求,利用高精度增量式光栅尺实现工作台位置测量,设计基于FPGA的增量式光栅信号采集系统整体结构。介绍光栅尺A、B脉冲信号的相位鉴定及脉冲计数方法,提出基于双模光纤介质的高速实时串行传输机制,介绍光纤通信内核的控制结构及其FPGA实现方法,实现信号采集卡与上位机控制卡的高速实时通信。增量式编码器数据采集实验结果表明,该系统具有高速、稳定可靠等优点。更多还原

【Abstract】 For the requirements of high-speed and real-time acquisition of stepper lithography stage’s position,a high accuracy grating was used to measure that and a structure of the increment grating signal acquisition system was designed based on FPGA.The phase identification and the pulse counting of grating ruler’s A and B pulse were introduced,at the same time,a high-speed serial transmission system based on the optical fiber was proposed.The structure of the fiber communication kernel and its implementation by using FPGA were introduced in detail.The results of experiments on incremental encoder data acquisition show that the system has the advantages of high speed,stability and reliability.更多还原