【摘要】 针对一种已经完成模拟设计、工艺研究及成品开发,且线度仅为百μm量级的太赫兹脉冲热载流子探测芯片展开了几何参数及电参数测试,并对其性能进行了分析探讨。结果表明:探测芯片具有较小的几何加工偏差和良好的欧姆接触效果;模拟计算的结果表明这种量级几何加工偏差对相对灵敏度影响可以忽略;综合分析各种测试测量结果,进一步验证了芯片开发工艺和测试结果的有效性。更多还原

【Abstract】 A thorough performance analysis of a type of sensing element,which is designed and manufactured for application to high power terahertz pulse measurement based on hot electrons effect in semiconductor,is carried out by measuring the geometric and electric parameters.Sensing elements achieve a little deviation from the optimal value and an excellent ohmic touch.The deviation of the sensing element has little effect on the relative sensitivity,as the simulation result shows.Validity of the manufacturing techniques for the sensing element is proved by making a synthesis of all the parameters during the whole course of the measurement.更多还原