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滚动压印装置研制与压印填充模拟
Design of Roll-to-Roll Imprinting Device and Simulation of Filling Process in Roll-to-Roll
【摘要】 紫外滚动压印因其可以在室温下、普通大气环境中高效大面积地进行微结构制作而备受瞩目.利用自行研制的紫外滚动压印装置,实现了微结构的快速复制.实验中发现当压印速度达到某一特定值时,会不可避免地产生气泡缺陷.采用流体软件Fluent对滚动压印充填过程进行分析,来研究气泡缺陷的产生机理.结果表明,压印速度过高导致空气被堵在图形空腔内,最终形成气泡缺陷.同时,低黏度的胶液和小的接触角更利于模型填充.此研究对于获得优化的滚动压印工艺具有一定的意义.
【Abstract】 The UV roll-to-roll( R2R) imprinting technique can provide a solution for low cost and large scale throughput of reproducing microstructures at room temperature in atmospheric environment. A selfdeveloped UV R2 R imprinting device was used to fulfill fast rolling printing of microstructures. The repeated experiments reveal that there is a maximum imprinting velocity if a perfect printed model without bubble defects could be gained. The computational fluid dynamics software—Fluent was employed to study the resin filling process of R2 R imprinting to obtain the forming mechanism of bubbles. Results indicate that air will be trapped in the pattern cavity if the imprinting velocity is too large,which brings about bubbles. Meanwhile,the lower viscosity resin and small contact angle are highly desired for the filling process,which is significant for getting optimization of R2 R imprinting parameters.
【Key words】 roll-to-roll imprinting; UV imprinting; bubble defects; fluid simulation;
- 【文献出处】 纳米技术与精密工程 ,Nanotechnology and Precision Engineering , 编辑部邮箱 ,2014年04期
- 【分类号】TS805
- 【被引频次】3
- 【下载频次】234