【摘要】 MEMS仿生矢量水听器具有体积小、成本低、安装方便、有矢量性等优点,将MEMS仿生矢量水听器应用于水下环境必须解决透声、绝缘、流激噪声抑制等问题.为此,在前期单层聚氨酯封装结构的基础上,提出聚氨酯-水-聚氨酯"三明治"式封装结构,外层聚氨酯直径36 mm,内层聚氨酯直径32 mm.完成了"三明治"式封装结构设计计算与试制测试;并通过典型使用环境实验验证该封装结构的流激噪声抑制能力.实验结果表明在20~1 000 Hz内该封装结构在几乎不损失灵敏度和矢量性的前提下,比前期的封装结构在抑制流激噪声能力方面提高20 dB以上.更多还原

【Abstract】 MEMS bionic vector hydrophone is characterized by its small size,low cost,easy installation and vector,etc.The problems about sound transmission,insulation and flow noise control must be solved when MEMS vector hydrophone is used in water.Therefore,based on the package structure of the previous MEMS vector hydrophone,a new "sandwich"-type package structure which is composed of polyurethane-water-polyurethane for MEMS vector hydrophone was put forward to solve these problems.The outer diameter is 36 mm,and the inner diameter is 32 mm.And the design,simulation,manufacture,and testing were fulfilled.When the frequency ranges from 20 Hz to 1 kHz,the experimental results in typical application environment show that the ability of flow noise control of the MEMS vector hydrophone with"sandwich"-type package structure is 20 dB higher than that of the previous package structure,with no loss of sensitivity or directional characteristic.更多还原