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基于泰伯-莫尔干涉技术的焦距测量系统校准技术研究
Calibration of Foci-Meter Based on Talbot-Moiré Interferometer
【摘要】 研制了一套用于测量超长焦距的泰伯-莫尔干涉仪,并设计了一套校准设备和方法对泰伯-莫尔干涉仪的测量不确定度进行评定,核准焦距范围达100 m。校准设备包括了一套焦距发生器和激光光源,利用经过计量的标准透镜和实验对焦距发生器进行标定、测量和量值溯源。通过实验结果分析和计算,可知该校准技术具有良好的测量不确定度,能够对基于泰伯-莫尔方法的焦距测量系统进行精确校准。
【Abstract】 It developed a method to calibrate the foci- meter based on Talbot- Moiré interferometer, the calibration range of focal length up to 100 meters. Moreover, it introduced a foci-meter based on Talbot-Moiré interferometer. It includes a lens group and a laser source to generate laser beams with steady focal length and wavefronts which used to calibrate the foci- meter. The focal length of the lens group is measured by experiments taking advantage of a traceable lens.The following conclusions can be derived from experimental results: the uncertainty of this calibration method is acceptable.
【Key words】 measurement; focal length; metrology; Talbot-Moiré interferometer;
- 【文献出处】 激光与光电子学进展 ,Laser & Optoelectronics Progress , 编辑部邮箱 ,2014年03期
- 【分类号】TN247
- 【被引频次】5
- 【下载频次】144