【摘要】 大功率电力半导体器件是电力电子行业的基础和核心。随着电力半导体器件产量越来越大,功率和电压等级越来越高,对其测试效率和测试质量的要求也越来越高。压力夹具是大功率半导体器件测试必不可少的环节,因此研制高效率、低成本及技术先进的大功率半导体器件测试压力夹具十分必要。采用电气比例阀控制气液增压缸压力技术研制一种新型压力夹具,实验结果表明:该夹具在相当大的范围内具有很好的控制精度和线性度。更多还原

【Abstract】 High power electric semiconductor device is the foundation and core of the power electronics industry. As the production volume of power semiconductor devices are more and more big,power and voltage level is more and more high,the requirements to test efficiency and test quality are increasingly high. Pressure fixture is necessary for the test of high power semiconductor device. So,it’s necessary to develop high power semiconductor device test pressure fixture which has high efficiency,low cost and advanced technology. The technology that electric proportional valve was used to control the pressure of the gas-liquid pressurized cylinder was adopted to design a novel pressure fixture. Experimental results indicate that the proposed pressure fixture has good accuracy and linearity.更多还原