【摘要】 为解决大口径太赫兹波探测系统束控元件加工精度差、效率低的难题,本文提出了一种利用LODTM数控光学加工机床进行SPDT(单点金刚石车削)制备太赫兹波束控元件的方法。该方法属于确定性加工范畴,通过使用单晶金刚石刀具进行超精密切削加工,可直接得到适用于太赫兹波段的高面形精度的反射及透射类元件。针对铝基金属材料进行了加工工艺实验,得到了口径Φ300mm的太赫兹雷达主反射镜;并利用精密坐标测量技术对主反射镜的面形精度进行检测,其检测结果优于设计指标。实验表明,基于LODTM确定性超精密加工得到的太赫兹波束控元件具有面形精度高、表面光洁度好等优点,可实现太赫兹波探测系统的高精度和低成本目标。更多还原

【Abstract】 In order to improve the precision and efficiency of shading components in large aperture terahertz wave detecting system, a technique for processing terahertz wave shading components by SPDT(single point diamond turing)based on large optics diamond turning machine was presented. The single crystal diamond cutting tools for ultra-precision machining used by the technique, and the high-precision components were obtained. The components could be applied to the reflectors and lenses of terahertz waveband. An experiment for 2A12 aluminum had been done to demonstrate the availability of the technique. A terahertz radar main reflector in diameter of 300 mm was obtained. The detection result for precision of the reflector by precision coordinate measuring technology was better than the design index.更多还原