【摘要】 研制了一种基于微机电系统(MEMS)技术的微型阵列式推进器,并开发了记录其点火过程的音频采集系统。该推进器利用金属溅射、体硅干法刻蚀等工艺制作点火电阻和燃烧室,完成了点火电阻、引线以及焊盘的一体化加工,利用硅-玻璃阳极键合工艺完成燃烧室和点火电阻的封装,并采用硅微麦克风捕获点火过程产生的音频信息。结果表明:MEMS阵列式推进器尺寸为8.8 mm×8.8 mm,采用5 V低电压供电实现推进器点火,功率约为900 mW,由捕获的音频信息可知,点火过程大约持续了40μs。作为皮卫星的有效载荷,满足飞行任务需求。更多还原

【Abstract】 Based on micro-electro-mechanical system( MEMS) technology,micro array thruster was designed and ignition process was recorded by audio acquisition system. Metal sputtering and dry etching process were utilized to form igniter and combustion chamber,respectively.The integrated ignition resister,wires and pads were fabricated.A reliable silicon-glass anodic bonding between combustion chamber and igniter was then formed.Silicon microphone was utilized to capture audio signal produced during propellant combustion. Test results show that size of MEMS array thruster is 8.8 mm×8.8 mm and 5 V DC low voltage meets ignition demands.Ignition power is estimated to be 900 mW.Captured audio data show that ignition process lasts about 40 μs.The audio system,as the payload of pico satellite,meets demand of flight.更多还原