【摘要】 针对传统的机械式共焦扫描方法由于受机械特性或驱动技术的限制难以满足材料内部物理过程检测、缓慢化学反应可视化和活体细胞成像等应用领域的需求,深入研究了基于纯相位液晶空间光调制器(LCSLM)的聚焦光斑三维位置控制技术,利用LCSLM对入射光进行相位与振幅的同时调制,设计了无机械运动部件的三维共焦扫描系统,实现了显微物镜聚焦光斑的三维扫描。研究结果表明,利用LCSLM能够实现最大横向偏转角度为0.021rad,光束偏转的绝对误差|θerror|<3.30×10-8 rad≈1.89×10-6,且能够实现轴向[-55.6mm,55.6mm]的扫描范围。更多还原

【Abstract】 Confocal microscopy has been widely used in biomedicine,materials science,industrial testing and other areas for its unique optical sectioning property,high lateral resolution performance and nondestructive detection.Since confocal microscopy takes lateral detection point by point,which can only get the information at one spot a time,3Dscanning becomes necessary in the process of confocal measurement.The traditional methods of confocal scanning are mechanical means,of which the characteristics or mechanical driving technology limitations could not meet the requirements of live cell imaging and other application areas.Aiming at the shortcomings of mechanical scanning methods,the technology of controlling the three-dimensional position of focusing spot based on phase-only liquid crystal spatial light modulator(LCSLM)is researched,the confocal three-dimensional scanning system with no mechanical moving parts is designed,and the three-dimensional scanning of microscope objectives of focusing spot is realized.The main method is the modulation of the incident light on the phase and amplitude with liquid crystal spatial light modulator.The results prove that the scanning method can be achieved and the maximum deflection angle is 0.021 rad,absolute error of beam deflection is|θerror|<3.30×10-8 rad≈1.89×10-6,and the axial scanning range that can be realized is,[-55.6mm,55.6mm].更多还原