【摘要】 基于标准互补金属氧化物半导体(CMOS)工艺流程,设计了p+/N-well和n+/p-sub两类结构的太阳能电池单元,通过分析影响电池性能参数的主要因素,设计、制备出4种不同单元尺寸的电池结构。测试结果表明,在标准测试条件下,面积50μm×50μm的单元结构具有最优的性能参数,其开路电压和短路电流分别为0.49V和76.61μA/mm2,最大输出功率达29.44μW/mm2,光电转换效率为2.94%。基于优化的器件结构,将两类不同结构的电池单元串联实现了高压输出的太阳能电池,电池的输出电压为0.95V,短路电流和最大输出功率分别为13μA/mm2和10.5μW/mm2。更多还原

【Abstract】 Based on the standard CMOS process,two types of solar cells are designed.They are a PN junction photodiode(PD)consisting of an N-well and a p+source/drain(S/D)region and a PD consisting of a p-sub and n+S/D region.By analyzing the critical factors affecting the device performance,the solar cells with four different geometries are designed and fabricated using standard CMOS process.The experimental results demonstrate that the solar cell with an area of 50μm×50μm has the optimal performance.The maximum output power obtained at the standard test conditions is 29.44μW/mm2,and the short-circuit current and open-circuit voltage are 76.61μA/mm2 and 0.49V,respectively.A conversion efficiency of 2.94%for p+/N-well solar cell is achieved.Based on the optimal structure parameters,a tandem solar cell connected by electrical short-circuit with a p+/N-well PD and an n+/p-sub PD is implemented in CSMC 0.18μm CMOS process.The solar cell generates a high-voltage output of 0.95V,and the short-circuit current and maximum output power of the solar cell are 13μA/mm2 and 10.5μW/mm2,respectively.The tandem solar cell formed in this paper has the potential for direct applications in wireless autonomous microsystems.更多还原