Laser micro-Raman spectroscopy was used to examine single-crystal diamond bombarded by focus ion beam(FIB).It was found that near-surface amorphous layers were generated by FIB milling process and there was a strong correlation between the thickness of the amorphous layer and the Raman intensity ratio of the amorphous phase to the crystalline phase.This finding provides the feasibility of a fast,nondestructive,quantitative and inexpensive measurement approach for subsurface damages of diamond by using laser...