【摘要】 喷墨打印头的喷孔直径一般为几十微米,材料一般是有机薄膜、不锈钢薄片等。针对有机膜等作为喷嘴板材料的缺陷,采用氧化锆陶瓷代替,以提高耐磨能力和耐腐蚀性。采用皮秒激光打孔方法,可在多种材料上加工出直径几十微米的小孔,包括聚酰亚胺(厚度50μm)、氧化锆陶瓷(厚度120μm)和铜片(厚度70μm)。通过控制不同的参数变化,可制备出孔径约20μm、孔间距为140μm的喷孔阵列。对比不同参数下喷孔尺寸和微观形貌发现,较高功率密度、较低单点停留时间有助于得到圆孔,减少重铸层。更多还原

【Abstract】 The nozzle diameter of the inkjet printhead is typically several tens of microns, and the material is generally organic thin film,stainless steel sheet or the like. For the disadvantage of organic thin film as nozzle plate material, zirconium oxide ceramics is used instead to improve wearability and corrosion resistance. Picosecond laser drilling method can be applied to fabricate orifices with a diameter of several tens of microns in a variety of materials including polyimide(50μm), zirconia ceramics(120μm) and thin copper sheet(70μm). By controlling various parameters, an array of nozzles with pore size of 20μm and interval of 140μm can be prepared. Comparison of different parameters nozzle size and micro-morphology indicates that higher power and lower single point residence time help to get a round hole, and to reduce recast layer.更多还原