ZnO thin film that grows at low temperature benefits the sharp interface in heterostructure and enough doping level of acceptor in ZnO. In general,the smooth growth can be easily obtained at temperature higher than 600 ℃,but difficult in the case of low growth temperature. In this work,by controlling the growth ambient and growth rate,a series of ZnO thin films with smooth surface were grown on a-plane sapphire substrates at 450 ℃ by the plasma-assisted molecular beam epitaxy( PMBE). The growth was performe...
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