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脉冲激光沉积技术制备的钪型阴极的发射性能

Emission Performance of Scandate Cathodes Prepared by Pulse Laser Deposition

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【作者】 彭真阴生毅郑强王欣欣王宇李阳

【Author】 Peng Zhen;Yin Sheng-yi;Zheng Qiang;Wang Xin-xin;Wang Yu;Li Yang;Institute of Electronics,Chinese Academy of Sciences;University of Chinese Academy of Sciences;

【机构】 中国科学院电子学研究所中国科学院大学

【摘要】 为提高阴极的发射性能以满足新型器件的需求,该文利用脉冲激光沉积技术制备了一种覆W+BaOSc2O3-SrO薄膜的浸渍扩散阴极。实验测得了该阴极在不同温度下的伏安特性曲线,并探讨了发射机制。结果表明,在1100?C工作温度下,该阴极的零场发射电流密度达到305.5 A/cm2;阴极表面形成的Ba-Sc-Sr-O活性层是阴极获得高发射性能的主要原因。文章还利用半导体模型解释了该阴极的非正常肖特基效应。

【Abstract】 In order to improve the emission performance of cathodes to meet the demands of new type devices,this paper develops a new-type scandate cathode coated with W+BaO-Sc2O3-SrO film prepared by Pulse Laser Deposition(PLD) technology.The experiment obtains emission current characteristics measured as a function of voltage and temperature and analyzes the emission mechanism.The test results indicate that at 1100 ?C the current density of the new cathode reaches 305.5 A/cm2;and the layer of Ba-Sc-Sr-O is the key to this excellent performance.The abnormal Schottky effect that the cathode appears is also investigated by using semiconductor model.

  • 【文献出处】 电子与信息学报 ,Journal of Electronics & Information Technology , 编辑部邮箱 ,2014年03期
  • 【分类号】O462
  • 【被引频次】9
  • 【下载频次】103
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