【摘要】 基于频闪显微干涉(stroboscopic interferometer vision system,SIVS)技术,提出了一种MEMS三维动态测量的同步控制系统。在该系统中,频闪的参数通过有USB功能的MCU从PC配置到FPGA中,然后由FPGA分别控制测量系统中的声光调制器、MEMS驱动器、微动平移台和千兆网相机。结合开发的应用软件,可以实时测量MEMS的运动。计算表明,使用该系统所能测量的MEMS的理论最高周期运动频率为1 MHz。实验证明这种方法行之有效。更多还原

【Abstract】 Based on SIVS(Stroboscopic Interferometer Vision System)technique,a new synchronous control system for three-dimensional MEMS dynamic measurements is proposed.In this system,the parameters of the strobe function are transferred from PC to the FPGA via MCU,which has a USB port.And then FPGA controls an AOM(AcoustoOptic Modulator),a MEMS driver,a Micro-Translation Stage and a Gigabit Ethernet Camera.Combined with the application,the on-line measurement of MEMS motion can be achieved.Calculations show that the system can measure the MEMS theoretical maximum frequency of the periodic motion of 1 MHz.Experiments show that this method is effective.更多还原