【摘要】 采用非平衡磁控溅射设备在热解碳表面沉积氧化钛薄膜,并置于超高真空环境中进行高温退火处理。利用X射线衍射评价薄膜的晶体结构;使用台阶仪分析退火前后薄膜表面曲率变化;采用纳米划痕法评价薄膜与基体之间的结合力。实验结果表明,高温退火处理不会改变氧化钛薄膜的相结构,仅使薄膜晶粒尺寸长大,结晶更完整;台阶仪扫描结果显示经过高温处理后薄膜表面发生的变形减小,显示出薄膜内应力减小;纳米划痕测试分析得出,高温退火处理可以提高薄膜与基体之间的膜基结合力。更多还原

【Abstract】 Unbalanced magnetron sputtering system was adopted to deposit titanium oxide film on low temperature isotropic pyrolytic carbon,and high temperature annealing method was used in ultrahigh vacuum environment.The crystal structure,the surface curvature and the adhesion between Ti-O films and substrate of as-deposited film and annealed film were characterized by X-ray diffraction(XRD),surface profiling instrument and nano-scratch instrument,respectively.XRD results proved that the phase structure of the titanium oxide could not be changed during high-temperature annealing process.The grain size became larger and Ti-O films was better-crystallized after high temperature annealing in vacuum.The scanning results displayed that the surface deformation decreased by high temperature treatment.Nano-scratch test analysis concluded that the film-substrate adhesion was increased after high temperature annealing.更多还原