【摘要】 离子氮化具有工件变形小、渗速快、节能环保等优点,能有效提高金属零部件的表面硬度、耐磨损和耐腐蚀等性能。然而受气体放电特性和电场效应的影响,工件形状对表面温度的均匀性影响很大,出现表面打弧、边缘效应和空心阴极效应等问题。为了克服传统直流离子渗氮的缺点,近年来出现了一些射频离子氮化、等离子体浸没离子注入、活性屏渗氮以及空心阴极氮化等新技术。更多还原

【Abstract】 Plasma nitriding offers many advantages such as small deformation,fast nitriding,energy saving and environmental protection,it can improve the surface hardness,wear resistance and corrosion resistance of the metal parts effectively.However,under the gas discharge characteristics and the electric field effect,it was found that the workpiece shape affect uniformity of surface temperature.Conventional plasma nitriding has some inherent shortcomings,such as damage caused to parts by arcing,the "edging effect", "hollow cathode effect".To overcome these common problems associated with conventional plasma nitriding,many methods including RF plasma nitriding,plasma immersion ion implantation,active screen plasma nitriding and hollow cathode discharge nitriding have been developed in the past few years.更多还原