【摘要】 针对正弦波式光栅尺幅值相位细分法中对模数转换处理要求高、软件计算复杂、实时性不强等问题,提出了一种基于方波相移的光栅尺信号检测方法。该方法先将正弦波转换成方波,再从两路方波信号的相对相位位移中提取出光栅尺位移信号,电路简单,软件处理容易,细分精度取决于微处理器主频,对光栅尺信号的正弦近似程度要求不严格。此外,当光栅尺栅距在满足一定条件下与永磁直线同步电机进行一体化设计时,还能直接获得电机动子初始位置。最后,通过实验验证了该方法的可行性,光栅尺的细分精度为0.09μm,直线电机伺服系统的定位控制精度为±0.9μm。更多还原

【Abstract】 For the problems that the amplitude phase subdivision method for sine-wave grating signal has a high requirement on ADC,a complex software processing,and a weak real-timing,a grating signal detection method based on the phase-shift between suqare waves is proposed. According to this method,sine waves are converted to square waves,and the grating displacement is extracted from the relative phase-shift between the two square waves. The hardware circuit and the software processing are simple,and the subdivision accuracy is depended on the MCU frequency. The strict sinusoidal similarity of grating signal is not required. Moreover,the mover initial position can be directly obtained when the grating is built in the permanent magnet linear synchronous motor under certain condition. Finally,the feasibility of this method is verified by experiments,the subdivision accuracy of grating is 0. 09μm,and the positional accuracy of linear motor servo system is ±0. 9 μm.更多还原