【摘要】 提出一种新颖红外传感器,这种传感器采用悬浮吸收层的双层结构的优势,来实现相对小尺寸下的高探测性能。双层结构采用2种牺牲层材料,分别为聚酰亚胺牺牲层和预埋在热偶条和沉底之间的多晶硅材料。仿真结果证明了该种结构的探测率、响应率和响应时间分别达到2.85×108cm Hz(1/2)/W、1 800 V/W和6 ms。本文给出了该种热电堆红外探测器高度兼容于CMOS工艺的制备流程,使器件的高效量产和低成本生产成为可能。更多还原

【Abstract】 A novel infrared(IR)detector is designed and presented.The detector takes advantage of suspended absorber-thermopile bi-layers to achieve high performance with a relatively small size.The bi-layers are realized by using two separated sacrificial layers,which include a Poly-Si film beneath the thermopiles and a polyimide deposition over the thermopiles.Simulation results demonstrate that the detectivity,responsibility and response time of the IR detectors can reach 2.85 × 108cmHz(1/2)/W,1 800 V /W and 6 ms,respectively.Moreover,the fabrication of the IR detector is highly compatible with standard CMOS process,which as a result,makes the high-yield and low-cost production possible.更多还原