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几种常用光学方法测量薄膜厚度设计
Several Optical Measurement Methods Applied To Measure Film Thickness
【摘要】 随着科技的进步和精密仪器的应用,薄膜厚度的测量方法层出不穷,准确测量薄膜的厚度和光学常数在薄膜的制备和应用中起着关键的作用,直接关系到该薄膜材料能否正常工作。本文通过对薄膜的光学测量方法进行归类,列举其中一些测量方法在教学中的应用。
【Abstract】 Due to the advantages of new technology and precise instruments,a variety of approaches to measure film thickness has been developed.And it’s vital to measure film thickness and optical constants precisely for the preparation and application of the film,which has direct effect on normal work of it.Classified by optical measurement method on the film,the application of some measurement method in teaching is illustrated.
【关键词】 薄膜厚度;
光学测量方法;
实验教学;
【Key words】 film thickness; the optical measurement method; experiment teaching;
【Key words】 film thickness; the optical measurement method; experiment teaching;
- 【文献出处】 长春师范大学学报 ,Journal of Changchun Normal University , 编辑部邮箱 ,2014年08期
- 【分类号】O484.5
- 【被引频次】3
- 【下载频次】624