【摘要】 MEMS加速度计是动作识别设备、姿态控制设备等电子设备的核心器件,其功能失效会严重影响设备的可靠性。而目前国内外还没有MEMS器件的可靠性实验标准,这在一定程度上制约了MEMS加速度计的应用与发展。针对该现状,深入研究了MEMS加速度计敏感部件的失效模式及失效机理,得到了典型环境应力与器件失效的关系,分析了加载环境应力可能导致器件失效的环境实验,并选取了相应的MEMS加速度计产品进行了可靠性实验验证,得出了MEMS加速度计可靠性评价的初步试行方案。更多还原

【Abstract】 MEMS accelerometer is the core device of electronic equipment such as action identification equipment and attitude control equipment,its function failure influences the reliability of the equipment seriously.But currently there is no reliability test standard of MEMS devices at home and abroad,thus restricting the application and development of the MEMS accelerometers to a certain extent.The failure mode and failure mechanism of the MEMS accelerometers were further researched to solve this problem,then the relationship of the typical environmental stress and device failure was obtained.The environment test for the loading environmental stress leading to the device failure was analyzed.The reliability experiment verification for the corresponding products of MEMS accelerometers was conducted,and the tentative reliability evaluation for the MEMS accelerometers was obtained.更多还原