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半导体列阵激光器波长复合设计及实验研究

Study on the Wavelength Multiplexing of Diode Laser Arrays

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【作者】 徐小红刘媛媛刘迪孙海东王梅王晓薇马骁宇

【Author】 XU Xiaohong;LIU Yuanyuan;LIU Di;SUN Haidong;WANG Mei;WANG Xiaowei;MA Xiaoyu;China University of Mining & Technology;Institute of Semiconductors,The Chinese Academy of Sciences;Hi-tech Optoelectronics Co.Ltd.;

【机构】 中国矿业大学海特光电有限责任公司中国科学院半导体研究所

【摘要】 利用半导体材料波长易调节的特点,设计了AlGaInAs/GaAs/AlGaAs压应变量子阱结构,得到760、800、860、930和976nm 5个波长激射的半导体列阵激光器,同时设计了4个短波通滤波片参数,开展了半导体列阵激光器的多波长光束复合技术的实验研究,最终实现了5个波长的半导体列阵激光器的光束复合,得到112W的激光功率输出,总体效率为88.5%,其中波长复合效率达92.4%,输出聚焦光斑尺寸为136μm×1 330μm,聚焦光功率密度达6.43×104 W/cm2。

【Abstract】 Making use of the characteristic of adjustable wavelength of semiconductor materials,AlGaInAs/GaAs/AlGaAs compressive strain quantum well structure was designed and the diode arrays with different wavelength of 760,800,860,930and 976nm were fabricated. And also four kinds of edge-band filters and one set of collimating system were designed.Then the five different beams were multiplexed and the laser power of 112W with the total efficiency of 88.54%is obtained.And the focused spot and the focus optical power density are measured to be 136μm×1 330μm and 6.43×104 W/cm2,respectively.

【基金】 国家自然科学基金项目(61275145)
  • 【文献出处】 半导体光电 ,Semiconductor Optoelectronics , 编辑部邮箱 ,2014年02期
  • 【分类号】TN248
  • 【下载频次】39
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