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99%氧化铍陶瓷活化Mo-Mn金属化机理研究

Investigation of Metallization Mechanism of 99% BeO Ceramics by Activation Molybdenum-Manganese Process

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【作者】 陈丽梅张巨先

【Author】 CHEN Li-mei;ZHANG Ju-xian;Beijing Vacuum Electronics Research Institute;Vacuum Electronics National Laboratory;

【机构】 北京真空电子技术研究所大功率微波电真空器件技术国防科技重点实验室

【摘要】 采用活化Mo-Mn法对99%氧化铍陶瓷进行了金属化实验和抗拉强度实验。封接强度实验结果表明,活化Mo-Mn法适合99%氧化铍陶瓷金属化封接,其焊接强度与氧化铝陶瓷相当。通过对99%氧化铍陶瓷金属化层的显微结构及金属层中的元素在金属层及陶瓷中的分布情况分析,探讨了99%氧化铍陶瓷Mo-Mn金属化机理。研究发现,99%氧化铍陶瓷金属化时,在氧化铍陶瓷和Mo海绵骨架中间形成了一层约3μm的过渡层,金属化层的Mo海绵骨架结构通过过渡层与氧化铍陶瓷基体紧密连接。

【Abstract】 Activation molybdenum-manganese process was used to metallize BeO ceramics.The results of sealing strength indicated that activation molybdenum-manganese process was fit for 99% BeO ceramics and the sealing strength of 99% BeO ceramics was the same as that of Al2O3 ceramics.By analyzing the microstructure of the metallizing layer and the distribution of the elements betweenBeO ceramics and metallizing layer,metallizing mechanism of 99% BeO ceramics was discussed.It was found there was about a 3μm glass phase transition layer between BeO ceramics and molybdenum sponge framework in metallizing layer.molybdenum sponge framework was tightly jointed with 99% BeO ceramics through the glass phasetransition layer.

  • 【文献出处】 真空电子技术 ,Vacuum Electronics , 编辑部邮箱 ,2013年04期
  • 【分类号】TQ174.1
  • 【被引频次】9
  • 【下载频次】198
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