In this paper,we introduce a z-axis quartz gyroscope using a double-H tuning fork,which has a high sensitivity.However,it also causes a large mechanical quadrature error.The laser trimming method is used to suppress this error at quartz level.The trimming law is obtained through the finite element method(FEM).A femtosecond laser processing system is used to trim the gold balancing masses on the beams,and experimental results are basically consistent with the simulated ones.The mechanical quadrature error is...
【英文摘要】
In this paper,we introduce a z-axis quartz gyroscope using a double-H tuning fork,which has a high sensitivity.However,it also causes a large mechanical quadrature error.The laser trimming method is used to suppress this error at quartz level.The trimming law is obtained through the finite element method(FEM).A femtosecond laser processing system is used to trim the gold balancing masses on the beams,and experimental results are basically consistent with the simulated ones.The mechanical quadrature error is...
【基金】
Project supported by the National Natural Science Foundation of China(Grant No.61027007)
【更新日期】
2014-03-27
【分类号】
TN249
【正文快照】
1.IntroductionThe micro-electro-mechanical system(MEMS)gyro-scope is a well-known angular rate sensor,which has beenwidely used in various inertia measurement fields,such asrobotics,vehicle brake systems,and image stabilization.[1,2]The quartz gyroscope i
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