Rhenium is a superconductor with a relatively weak tendency to oxidize, which is advantageous in superconducting quantum circuit and qubit applications. In this work, Re/Al-AlOx/Re Josephson tunnel junctions were fabricated using a selective film-etching process similar to that developed in Nb trilayer technology. The Re films had a superconducting transition temperature of 4.8 K and a transition width of 0.2 K. The junctions were found to be highly reproducible using the fabrication process and their chara...
【英文摘要】
Rhenium is a superconductor with a relatively weak tendency to oxidize, which is advantageous in superconducting quantum circuit and qubit applications. In this work, Re/Al–AlOx/Re Josephson tunnel junctions were fabricated using a selective film-etching process similar to that developed in Nb trilayer technology. The Re films had a superconducting transition temperature of 4.8 K and a transition width of 0.2 K. The junctions were found to be highly reproducible using the fabrication process and their chara...
【基金】
supported by the National Natural Science Foundation of China (Grant Nos. 11104340 and 11104332);
the Ministry of Science and Technology of China (Grant Nos. 2009CB929102 and 2011CBA00106)
【更新日期】
2013-10-10
【分类号】
TM26
【正文快照】
1. Introduction Superconducting quantum circuits based on Josephson junctions have the advantages of low dissipation, scalability, and flexibility in quantum-state preparation, manipulation, and readout. They are promising candidates in the realization of