【摘要】 提出了一种用电感耦合等离子体原子发射光谱(ICP-AES)法直接测定Cr20Ni80镍铬合金溅射靶材中主量元素Cr和次量元素Si、Mn、P、Cu、Fe、Ti、Ce的分析方法。在低温加热下用硝酸-盐酸混合酸(V硝酸∶V盐酸∶V水=65∶200∶735)溶解试样,选择Si 251.612nm、Mn257.611nm、P 178.287nm、Cr 284.984nm、Cu 324.754nm、Fe 259.941nm、Ti 334.941nm和Ce 418.660nm的光谱线作为分析线,大量基体元素如镍、铬、钇产生的基体效应影响可以通过基体匹配方法消除,谱线的重叠干扰和非光谱干扰不明显。测定主量元素Cr时,由于检测信号的短时漂移和波动对测定有影响,可以通过加入内标元素Y克服。对4种Cr20Ni80镍铬合金溅射靶材试样中上述8种元素进行测定,结果的相对标准偏差均小于2%,对Cr20Ni80镍铬合金标样中Si、Mn、P、Cr、Cu、Fe、Ti进行测定,测定值与认定值相符。更多还原

【Abstract】 A direct analysis method of major element(Cr)and minor elements(Si,Mn,P,Cu,Fe,Ti and Ce)in Cr20Ni80nickel-chromium alloy sputtering target material by inductively coupled plasma atomic emission spectrometry(ICP-AES)was proposed.The sample was dissolved with mixed nitric acid and hydrochloric acid(VHNO3∶VHCl∶VH2O=65∶200∶735)by heating at low temperature.The spectral lines of Si 251.612nm,Mn 257.611nm,P 178.287nm,Cr 284.984nm,Cu 324.754nm,Fe259.941nm,Ti 334.941nm and Ce 418.660nm were selected as analytical lines.The matrix effect of nickel,chromium and yttrium could be eliminated by matrix matching method.The spectral overlapping interference and non-spectral interference were not obvious.During the determination of major element Cr,the influence of short-time drifting and fluctuation of detection signals on the determination could be overcome by adding internal standard element Y.Eight elements above in four Cr20Ni80 nickel-chromium alloy sputtering target material were determined.The relative standard deviations(RSD)of found results were less than 2%.The Si,Mn,P,Cr,Cu,Fe and Ti in Cr20Ni80 nickelchromium alloy reference materials were determined,and the results were consistent with the certified values.更多还原