【摘要】 介绍了AIN薄膜体声波(FBAR)传感器以及信号处理电路的原理,着重设计了传感器的频率检测电路。频率检测电路采用VHDL语言对各个电路子模块编写相应的代码,并利用Quartus9.0完成了仿真。仿真结果表明,相对精度为10-6,达到了预期的设想,满足了FBAR传感器的要求。更多还原

【Abstract】 This paper describes the principles of the AlN FBAR sensor and the signal processing circuit,and focuses on the design of the frequency detection circuit of the sensor.This circuit uses VHDL language to write the corresponding code for each circuit sub-module,and uses Quartus9.0 to complete the simulation.Simulation results show that the relative accuracy is 10-6,that reaches the expected goal and meets the requirements of the FBAR sensor.更多还原