【摘要】 利用流体-亚稳态原子传输混合模型研究了氩气矩形空心阴极放电稳态时的参数.数值计算得到了压强为10Torr时的电势、电子、离子和亚稳态氩原子密度以及电子平均能量的分布.结果表明电子和离子密度峰值为4.7×1012cm-3,亚稳态原子密度峰值为2.1×1013cm-3.本文同时对流体-亚稳态原子传输混合模型和单一流体模型模拟得到的放电参数进行了比较.结果表明,分步电离是新电子产生的重要来源,亚稳态原子对空心阴极放电特性有重要影响.与单一流体模型相比,混合模型计算得到的电子密度升高,阴极鞘层宽度和电子平均能量降低.更多还原

【Abstract】 The characteristics of rectangular hollow cathode discharge are studied based on a fluid model combined with a transport model for metastable Ar atoms in argon. The distribution of potential, density of electrons and ions, and the density of metastable atoms are calculated at a pressure of 10 Torr. The peak density of electron and ion is 4.7×1012cm-3 , and the peak density of metastable atoms is 2.1×1013cm-3 . Results obtained in terms of fluid-metastable hybrid model are compared with that in terms of the fluid model, which show that the electron produced by stepwise ionization is one of the important source of new electrons, and the metastable atoms have an obvious effect on the hollow cathode discharge. Compared with the results calculated in terms of fluid model, the density of electrons obtained in terms of hybrid model increases, and the depth of cathode sheath and the averaged electron energy decrease.更多还原