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Enhanced Radiation Sensitivity in Short-Channel Partially Depleted Silicon-on-Insulator n-Type Metal-Oxide-Semiconductor Field Effect Transistors

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【作者】 彭超张正选胡志远黄辉祥宁冰旭毕大炜

【Author】 PENG Chao;ZHANG Zheng-Xuan;HU Zhi-Yuan;HUANG Hui-Xiang;NING Bing-Xu;BI Da-Wei;State Key Laboratory of Functional Materials for Informatics,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences;Science and Technology on Reliability Physics and Application Technology of Electronic Component Laboratory;

【机构】 State Key Laboratory of Functional Materials for Informatics,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of SciencesScience and Technology on Reliability Physics and Application Technology of Electronic Component Laboratory

【摘要】 The total ionizing dose effects of partially depleted silicon-on-insulator(SOI)transistors in a 0.13μm technology are studied by60Coγ-ray irradiation.Radiation enhanced drain-induced barrier lowering(DIBL)under different bias conditions is related to the parasitic bipolar in the SOI transistor and oxide trapped charge in the buried oxide,and it is experimentally observed for short channel transistors.The enhanced DIBL effect manifests as the DIBL parameter increases with total dose.Body doping concentration is a key factor affecting the total ionizing dose effect of the transistor.The low body doping transistor exhibits not only significant front gate threshold voltage shift as a result of the coupling effect,but also great off-state leakage at high drain voltage due to the enhanced DIBL effect.

【Abstract】 The total ionizing dose effects of partially depleted silicon-on-insulator(SOI) transistors in a 0.13 μm technology are studied by 60Co γ-ray irradiation.Radiation enhanced drain-induced barrier lowering(DIBL) under different bias conditions is related to the parasitic bipolar in the SOI transistor and oxide trapped charge in the buried oxide,and it is experimentally observed for short channel transistors.The enhanced DIBL effect manifests as the DIBL parameter increases with total dose.Body doping concentration is a key factor affecting the total ionizing dose effect of the transistor.The low body doping transistor exhibits not only significant front gate threshold voltage shift as a result of the coupling effect,but also great off-state leakage at high drain voltage due to the enhanced DIBL effect.

【基金】 Supported by the Opening Project of Science and Technology on Reliability Physics and Application Technology of Electronic Component Laboratory(ZHD201205);the National Natural Science Foundation of China(61106103 and 61107031)
  • 【文献出处】 Chinese Physics Letters ,中国物理快报(英文版) , 编辑部邮箱 ,2013年09期
  • 【分类号】TN386.1
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