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Characterization of HfSiAlON/MoAlN PMOSFETs Fabricated by Using a Novel Gate-Last Process

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【作者】 许高博徐秋霞殷华湘周华杰杨涛牛洁斌贺晓彬孟令款余嘉晗李俊峰闫江赵超陈大鹏

【Author】 XU Gao-Bo;XU Qiu-Xia;YIN Hua-Xiang;ZHOU Hua-Jie;YANG Tao;NIU Jie-Bin;HE Xiao-Bin;MENG Ling-Kuan;YU Jia-Han;LI Jun-Feng;YAN Jiang;ZHAO Chao;CHEN Da-Peng;Key Laboratory of Microelectronics Devices & Integrated Technology,Institute of Microelectronics, Chinese Academy of Sciences;

【机构】 Key Laboratory of Microelectronics Devices & Integrated Technology,Institute of Microelectronics, Chinese Academy of Sciences

【摘要】 We fabricate p-channel metal-oxide-semiconductor-field-effect-transistors(PMOSFETs) with a HfSiAlON/MoAlN gate stack using a novel and practical gate-last process.In the process,SiO2/poly-Si is adopted as the dummy gate stack and replaced by an HfSiAlON/MoAlN gate stack after source/drain formation.Because of the high-k/metalgate stack formation after the 1000°C source/drain ion-implant doping activation,the fabricated PMOSFET has good electrical characteristics.The device’s saturation driving current is 2.71 x 104 A/μm(VGS = VDS =-1.5 V)and the off-state current is 2.78 x 109 A/μm.The subthreshold slope of 105mV/dec(YDS = —1-5 V),drain induced barrier lowering of 80mV/V and Vth of —0.3 V are obtained.The research indicates that the present PMOSFET could be a solution for high performance PMOSFET applications.

【Abstract】 We fabricate p-channel metal-oxide-semiconductor-field-effect-transistors(PMOSFETs) with a HfSiAlON/MoAlN gate stack using a novel and practical gate-last process.In the process,SiO2/poly-Si is adopted as the dummy gate stack and replaced by an HfSiAlON/MoAlN gate stack after source/drain formation.Because of the high-k/metalgate stack formation after the 1000°C source/drain ion-implant doping activation,the fabricated PMOSFET has good electrical characteristics.The device’s saturation driving current is 2.71 x 104 A/μm(VGS = VDS =-1.5 V)and the off-state current is 2.78 x 109 A/μm.The subthreshold slope of 105mV/dec(YDS = —1-5 V),drain induced barrier lowering of 80mV/V and Vth of —0.3 V are obtained.The research indicates that the present PMOSFET could be a solution for high performance PMOSFET applications.

【基金】 Supported by the Beijing Natural Science Foundation under Grant No 4123106;Important National Science&Technology Specific Projects of China under Grant No 2009ZX02035
  • 【文献出处】 Chinese Physics Letters ,中国物理快报(英文版) , 编辑部邮箱 ,2013年08期
  • 【分类号】TN386
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