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Asymmetric Underlap in Scaled Floating Body Cell Memories

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【作者】 伍青青陈静罗杰馨吕凯柴展余涛王曦

【Author】 WU Qing-Qing;CHEN Jing;LUO Jie-Xin;LU Kai;CHAI Zhan;YU Tao;WANG Xi;The State Key Laboratory of Functional Materials for Informatics,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences;University of the Chinese Academy of Sciences;

【机构】 The State Key Laboratory of Functional Materials for Informatics,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of SciencesUniversity of the Chinese Academy of Sciences

【摘要】 The asymmetric underlap device for a floating body cell is proposed without any extra process or photomask during fabrication.The electric field in the gate-drain underlap region is quietly relaxed.It is found that memory operation would fail in bipolar-based floating body cells because band-to-band tunneling significantly alters the body potential.Measurements show the proposed structure could indeed suppress the undesirable band-to-band tunneling greatly so that the bistable state via the parasitic bipolar junction transistor is ensured in scaled floating body cells.The parasitic capacitances in both word line and bit line are also reduced.

【Abstract】 The asymmetric underlap device for a floating body cell is proposed without any extra process or photomask during fabrication.The electric field in the gate-drain underlap region is quietly relaxed.It is found that memory operation would fail in bipolar-based floating body cells because band-to-band tunneling significantly alters the body potential.Measurements show the proposed structure could indeed suppress the undesirable band-to-band tunneling greatly so that the bistable state via the parasitic bipolar junction transistor is ensured in scaled floating body cells.The parasitic capacitances in both word line and bit line are also reduced.

  • 【文献出处】 Chinese Physics Letters ,中国物理快报(英文版) , 编辑部邮箱 ,2013年06期
  • 【分类号】TN32
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