A Computational Study of Radio Frequency Atmospheric Pressure Discharge in Nitrogen and Oxygen Mixture Gases

【摘要】 The characteristics of radio frequency atmospheric pressure discharge in nitrogen and oxygen mixture gases are investigated by using a one-dimensional fluid model.The model consists of equations of particle continuity,Poisson’s equation,and the electron energy equation.The effect of the concentrations of O₂ in N₂ on the discharge characteristics is analyzed.The results show that when the concentration of O₂ in N₂ is less than 12%,as the amount of O₂ grows,the electron density and the N₄⁺ ion density decrease;the main negative particles are electrons.When the concentration of O₂ in N₂ is greater than 12%,the electron density and the N₄⁺ ion density increase with the increasing admixture of oxygen;the main negative particle is the O^- ion.Moreover,the O^-ion density,the O₂ ion density,the electron temperature and the mixture gases electronegativity increase with growth of O₂ in the range from 4%to 20%and with density of O₂ in N₂.更多还原

【Abstract】 The characteristics of radio frequency atmospheric pressure discharge in nitrogen and oxygen mixture gases are investigated by using a one-dimensional fluid model.The model consists of equations of particle continuity,Poisson’s equation,and the electron energy equation.The effect of the concentrations of O₂ in N₂ on the discharge characteristics is analyzed.The results show that when the concentration of O₂ in N₂ is less than 12%,as the amount of O₂ grows,the electron density and the N₄⁺ ion density decrease;the main negative particles are electrons.When the concentration of O₂ in N₂ is greater than 12%,the electron density and the N₄⁺ ion density increase with the increasing admixture of oxygen;the main negative particle is the O^- ion.Moreover,the O^-ion density,the O₂ ion density,the electron temperature and the mixture gases electronegativity increase with growth of O₂ in the range from 4%to 20%and with density of O₂ in N₂.更多还原