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Graphene Domains Synthesized on Electroplated Copper by Chemical Vapor Deposition

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【作者】 王文荣梁晨李铁杨恒鲁娜王跃林

【Author】 WANG Wen-Rong;LIANG Chen;LI Tie;YANG Heng;LU Na;WANG Yue-Lin;State Key Laboratories of Transducer Technology,Science and Technology on Microsystem Laboratory,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences;University of Chinese Academy of Sciences;

【机构】 State Key Laboratories of Transducer Technology,Science and Technology on Microsystem Laboratory,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of SciencesUniversity of Chinese Academy of Sciences

【摘要】 Electroplated Cu,which can be compatible with integrated circuit technology and large-scale silicon wafers,is explored as a substrate to synthesize graphene domains by ambient-pressure chemical vapor deposition.Hexagonal single crystal domains of graphene are synthesized on electroplated Cu under dilute methane gas How.Scanning electron microscopy images of graphene domains grown on electroplated Cu indicate that the domain size is timedependent,and the domains can cross Cu grain boundaries and are distributed more uniformly on electroplated Cu surface than those grown on Cu foil.

【Abstract】 Electroplated Cu,which can be compatible with integrated circuit technology and large-scale silicon wafers,is explored as a substrate to synthesize graphene domains by ambient-pressure chemical vapor deposition.Hexagonal single crystal domains of graphene are synthesized on electroplated Cu under dilute methane gas How.Scanning electron microscopy images of graphene domains grown on electroplated Cu indicate that the domain size is timedependent,and the domains can cross Cu grain boundaries and are distributed more uniformly on electroplated Cu surface than those grown on Cu foil.

【基金】 Supported by the National Science and Technology Specific Projects(No 2011ZX02707);the National Basic Research Program of China(No 2011CB309501);the Foundation for Innovative Research Groups of the National Natural Science Foundation of China under Grant(No 61021064);the National Natural Science Foundation of China(Nos 60936001,81201358 and 91123037)
  • 【文献出处】 Chinese Physics Letters ,中国物理快报(英文版) , 编辑部邮箱 ,2013年02期
  • 【分类号】TN304.055
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