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Research of Infrared Imaging at Atmospheric Pressure Using a Substrate-Free Focal Plane Array

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【作者】 吴健雄程腾张青川张勇毛亮高杰陈大鹏伍小平

【Author】 WU Jian-Xiong;CHENG Teng;ZHANG Qing-Chuan;ZHANG Yong;MAO Liang;GAO Jie;CHEN Da-Peng;WU Xiao-Ping;CAS Key Laboratory of Mechanical Behavior and Design of Materials,University of Science and Technology of China;Institute of Microelectronics,Chinese Academy of Sciences;

【机构】 CAS Key Laboratory of Mechanical Behavior and Design of Materials,University of Science and Technology of ChinaInstitute of Microelectronics,Chinese Academy of Sciences

【摘要】 An equivalent circuit model to the substrate-free focal plane array(FPA) is established.Using this fast and effective model,the performance of infrared(IR) imaging at atmospheric pressure is investigated and it is found that the substrate-free FPA has the ability of IR imaging at atmospheric pressure,whereas it has a slightly degraded noise equivalent temperature difference(NETD) as compared with IR imaging under a high vacuum.This feature is also identified experimentally by a substrate-free FPA with pixel size of 50×50μm2.The NETDs are measured to be 160mK at 10-2 Pa pressure and 1.08K at atmospheric pressure.

【Abstract】 An equivalent circuit model to the substrate-free focal plane array(FPA) is established.Using this fast and effective model,the performance of infrared(IR) imaging at atmospheric pressure is investigated and it is found that the substrate-free FPA has the ability of IR imaging at atmospheric pressure,whereas it has a slightly degraded noise equivalent temperature difference(NETD) as compared with IR imaging under a high vacuum.This feature is also identified experimentally by a substrate-free FPA with pixel size of 50×50μm2.The NETDs are measured to be 160mK at 10-2 Pa pressure and 1.08K at atmospheric pressure.

【基金】 Supported by the National Natural Science Foundation of China under Grant Nos 11072233,11102201 and 11127201;the China Postdoctoral Science Foundation under Grant No 20100480684;the Fundamental Research Funds for the Central Universitiesunder Grant No WK2090050017;the Natural Science Foundation of Jiangsu Province under Grant No BK2011373;the National Basic Research Program of China under Grant No 2006CB300404
  • 【文献出处】 Chinese Physics Letters ,中国物理快报(英文版) , 编辑部邮箱 ,2013年01期
  • 【分类号】O434.3
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