【摘要】 合理利用太阳光是当今节能与环保学科的重要课题。以钛金属为靶材,在O2气氛中用准分子脉冲激光沉积法(PLD),在石英玻璃基片上制备了钛的金属氧化物薄膜。XRD和AFM研究结果表明,TiO2薄膜透明呈浅褐色,晶粒尺寸在数百nm,成膜均匀致密,光滑平整。经紫外和红外光谱发现:TiO2薄膜反射率为20.7%,是一种低反射薄膜,其在可见光区的透过率约为76%,对紫外的阻隔率大于70%,对近红外的阻隔率大于20%。TiO2薄膜吸波性能和透波性与纳米金属粒子的粒径、形状和排布密切相关。综合考虑紫外区和近红外区的阻隔作用与可见光区的透过率,TiO2在开发抗近红外/紫外的新型隔热薄膜方面具有良好的发展前景。更多还原

【Abstract】 Reasonable utilization of solar power is an important subject for energy saving and environmental protection nowadays.Uses titanium as target material,prepares titanium oxide film deposited on quartz glass substrates with excimer pulsed laser deposition method in oxygen atmosphere.The results of XRD and AFM show that the TiO2 film has the color of slight brown,the grain size is several hundred nanometer,the film is even and thickening,also smoothy and plane.The ultraviolet spectrum and infra-red spectrum discover that the reflection rate of the film is 20.7%,it is a low reflecting film,the transmission is 76% in visible spectrum,the block rate to ultra violet is higher than 70%,to near infra-red is higher than 20%.The absorptional character and transmissional character of the TiO2 film have close relationship with particle size,particle shape and particle array.Comprehensively considering the block effect in ultraviolet and near infra-red section,as well as the transmission in visible section,the TiO2 film has good prospect in new type heat insulation film in anti-near-infra-red and anti-ultraviolet.更多还原