节点文献
半导体金属氧化物气体传感器灵敏性的研究进展
Research Progress of Metal Oxide Semiconductor Gas Sensors
【摘要】 半导体金属氧化物传感器广泛应用于气体的检测,而影响气体传感器的气敏特性的因素主要有灵敏性、选择性、稳定性、响应时间和重复性等。灵敏性是气体传感器的最主要性能指标,成为有关传感器的研究热点。实验研究表明,气体传感器的灵敏性与传感器感应膜的表面反应有关。主要介绍了影响传感器灵敏性的主要因素,如化学组成、表面改性、感应膜的微观结构、温度和湿度等。
【Abstract】 Metal oxide semiconductor gas sensors are widely used as detecting gases.Meanwhile the factors that influence their gas sensing property are sensitivity,selectivity,stability,response time and repetitiveness.Researchers are devoting themselves to improving the sensitivity of the gas sensors for their importance of measuring.The experiment results indicate that sensitivity is related to surface reaction,which is mainly influenced by chemical components,surface-modification,microstructure of a sensing film,temperature,and humidity.
- 【文献出处】 陶瓷学报 ,Journal of Ceramics , 编辑部邮箱 ,2013年03期
- 【分类号】TP212
- 【被引频次】30
- 【下载频次】749