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磁控溅射Sn-Sb-Cu薄膜的制备及摩擦学性能研究
Preparation and Tribological Properties Research of Magnetron Sputtered Sn-Sb-Cu Films
【摘要】 采用双靶磁控溅射方法,在合适的溅射参数下在40Cr钢基体上制备巴氏合金薄膜,并对其结构以及摩擦学性能进行分析。结果表明:薄膜中出现Sn,SbSn,Cu6Sn5多种物相,其纳米硬度为5.7 GPa,弹性模量为235 GPa,具有较高的弹性模量硬度比;油润滑时在合适的载荷和转速下巴氏合金薄膜和对磨件之间会形成动压油膜,从而降低摩擦磨损,其中在0.3 N载荷、150 r/min转速下摩擦因数可低至0.05;巴氏合金薄膜不适合用于干摩擦。
【Abstract】 Babbit alloy film was prepared on 40Cr steel base by double targets magnetron sputtering method with appropriate sputtering parameters,and its structure and tribological properties were analyzed.The results show that Sn,SbSn,Cu6Sn5 and other phases appear in the babbit alloy film.The film has a high ratio of elastic modulus to hardness,its nano hardness is 5.7 GPa,elastic modulus is 235 GPa.Under oil lubrication and a suitable load and speed,the dynamic pressure oil film appears between babbit alloy film and friction part,so as to reduce the friction and wear.A low friction coefficient of 0.05 is got in the load of 0.3N and speed of 150r/min.Babbit alloy films are not suitable to work in dry friction.
【Key words】 magnetron sputtering; Sn-Sb-Cu films; dry friction; oil lubrication;
- 【文献出处】 润滑与密封 ,Lubrication Engineering , 编辑部邮箱 ,2013年09期
- 【分类号】TB43
- 【被引频次】4
- 【下载频次】131