【摘要】 针对高功率激光装置所需的大口径光学元件,进行了小工具数控抛光中频误差控制工艺研究。对数控加工过程中卷积效应对中频误差的影响进行分析,并建立了残余误差分析模型,对卷积效应所引入的残余误差进行定量分析。利用该模型对中频误差修正工艺参数进行了仿真分析,并进行了修正工艺参数实验验证,确定了全面匀滑最优化参数。在最优化工艺参数的基础上,针对大口径光学元件开展了数控抛光中频误差控制工艺实验验证,使400mm口径平面窗口元件加工精度达到透射波前PV值为0.27λ,透射波前PSD1RMS值为1.67nm。该实验结果表明,通过400mm口径平面窗口元件的中频PSD1控制技术研究,使窗口元件能够达到高功率激光装置对中频PSD1的指标要求。更多还原

【Abstract】 For large optics of high-power laser facility,the controlling technology of mid-spatial frequency error is developed.Firstly,the CCOS convolution residual error caused by regular path is analyzed,and the residual error model is established.And then,the optimization parameters for controlling mid-spatial frequency error are achieved by this model.Finally,according to the optimization parameters,the mid-spatial frequency error of 400mm aperture window is remarkably improved.After several CCOS iteration,the peak-to-valley(PV)is 170.856nm,the root-mean-square(RMS)of PSD1is 1.67nm and no obvious midspatial frequency error is found.The result shows that the mid-spatial frequency error of 400mm aperture window is under control,and the 400mm aperture windows can be achieved and meet the requirement of mid-spatial frequency error in high-power laser facility.更多还原