【摘要】 精密长光栅作为高档数控机床中的核心部件,其制造能力和精度直接决定高精密机床的制造水平.本文对纳米滚压印技术制造长光栅中的核心部件——圆柱母光栅的制造开展研究,建立了高精度的母光栅刻划制造平台,保证了母光栅制造的精度要求;分析了微尺度毛刺的形成机理和抑制方法,对母光栅材料选择及微尺度刻划工艺参数进行了优化,实现了直径110 mm,周期分别为20μm、10μm和4μm整圈圆柱母光栅的高精度微刻划制造.母光栅刻划总条数为数万条,4μm周期母光栅连续刻划时间超过62 h,最终实现母光栅的首尾拼接误差控制小于300 nm.另外,针对滚压印加工中的填充问题,利用聚焦离子束(FIB)技术制备了V形、梯形等形状金刚石刀具,获得了良好的光栅压印结果.更多还原

【Abstract】 As a core device of high precision computer numerical control(CNC) machine tools,largescale micro-pitch grating directly determines the level of the manufacturing capacity of CNC machine tools.And it is a viable technology innovation to use nano-imprint roller technology to achieve high-precision large-scale micro-pitch grating.In this paper,a precision experiment machining platform was established for manufacturing the cylindrical grating template.And great efforts were made to improve the micro-fabricating process,and the parameters and materials were optimized during the experiments.With various factors,such as efficiency,quality of cutting,quality of nano-imprint,considered,the 20 μm, 10 μm and 4 μm pitch precision micro-cuttings of roller grating template in a full circle with the diameter of 110 mm were achieved.The number of the grooves is more than ten thousand,and the cutting time is over 62 h in the 4 μm pitch cutting process.The total splice error of the roller grating template is less than 300 nm.To solve the problem of insufficient filling during the nano-imprint,the V-shaped and trapezoid diamond tools were fabricated by focused ion beam(FIB) technology,and good nano-imprint resuits were obtained.更多还原