【摘要】 微泵是微流体芯片发展水平的重要标志.为提高微泵的工作性能,提出了一种新型行波驱动的压电微泵.在设计了不同的微管道结构(锯齿形微管道和直微管道)的基础上,对压电执行器和微管道进行仿真分析和优化设计.采用热键合工艺制作具有不同微管道的微泵,在不同频率的驱动信号下测定行波微泵的频率特性,同时也测量了微泵流速与背压的关系曲线以及电压幅值特性.相比于直管道微泵,锯齿形管道微泵具有更好的工作性能,在26 V驱动电压下,其最大平均流速和背压分别达到33.36μL/min和1.13 kPa.更多还原

【Abstract】 The micropump is an important factor in the development of the microfluidic chip.A novel piezoelectric micropump driven by traveling wave was presented to improve its performance.Firstly,the micropumps were designed with different microchannels(saw-tooth and straight microchannels),and the model simulation of the vibration of bimorphs and the deformation of microchannels were conducted and optimized.Then the micropumps with different microchannels were fabricated by thermal bonding technology.The performance of micropumps was tested at different frequencies of driving signal.Meanwhile,the relationship between the flow rate and the back pressure was measured and the voltage amplitude property was also tested.From the simulation and experimental results,it can be concluded that the micropump with saw-tooth microchannel exhibits higher maximum average flow rate(33.36 μL/min) and back pressure(1.13 kPa) than those with straight microchannel when driving voltage amplitude is fixed at 26 V.更多还原