【摘要】 提出了一种新型的双压电泵膜结构,分析了泵膜小挠度弯曲形变理论。运用ANSYS软件建立了泵膜的有限元模型,并对泵膜进行了电压驱动静态分析和模态分析,通过正交试验法对泵膜结构进行了优化。分析表明,压电层厚度对膜片形变影响最大,其次依次是驱动电压、泵膜半径、电极层厚度、基层厚度;泵膜半径对膜片频率影响最大,其次依次是压电层厚度、电极层厚度、基层厚度;对泵膜结构进行优化,可以提高微泵的工作效率,研究结果为微泵的优化设计提供了依据。更多还原

【Abstract】 A new kind of double piezoelectric layers driven pump membrane structure is introduced and the small deflection bending deformation theory pump membrane is analyzed.Using ANSYS software to establish the finite element model of the pump membrane,the static analysis and modal analysis is done.The pump membrane structure is optimized by using orthogonal test method.The results show that piezoelectric layer thickness influenced the deformation of pump membrane the most,and the driving voltage,pump membrane radius,electrode layer thickness,and basic level thickness followed.Pump membrane radius influenced the frequency of pump membrane the most,and the piezoelectric layer thickness,electrode layer thickness and basic level thickness followed.To optimize pump membrane structure can improve the efficiency of micro-pump,and the results provide the basis for the optimal design of micro-pump.更多还原