【摘要】 采用Monte Carlo方法模拟N2/Ti微空心阴极放电等离子体阴极溅射过程,其中,氮离子(N2+,N+)轰击阴极表面采用PIC/MC模型模拟.计算溅射钛原子的热化过程、钛原子的密度及其平均能量分布.结果表明,沿各方向溅射出的90%金属Ti原子所带的初始能量小于30 eV,其散射角主要分布在30°和60°之间;溅射Ti原子在离微空心阴极壁约0.04 mm处出现热化极大值.更多还原

【Abstract】 We analyze numerically thermalization process of atoms sputtered from a cathode in N2/Ti micro-hollow cathode discharge plasma by using Monte Carlo method.PIC/MC model is used to simulate nitrogen ion(N2+,N+) bombarding cathode surface.Thermalization process,density distribution and average energy of Ti atoms are calculated.It shows that initial energy sputtered to all directions from 90 percent of Ti metal atoms is less than 30 eV.Its scattering angle is mainly between 30 and 60 degrees.And thermalization maximum of sputtering Ti atoms is appeared at a distance of about 0.04mm from the hollow cathode wall.更多还原