【摘要】 影子云纹测量技术用于微电子封装基板翘曲测量中,条纹图往往受到被测基板均布芯片产生的规则噪声的影响,导致包裹相位质量较差,不能正确解包,引起较大的测量误差。针对条纹图中的规则噪声,分别采用常用的均值滤波、中值滤波和傅里叶变换滤波方法处理条纹图,傅里叶变换滤波方法能有效消除条纹图中规则背景噪声的影响,改善包裹相位图质量,提高测量精度。更多还原

【Abstract】 Shadow moiré technique is widely used in measuring the warpage of substrate of microelectronics packaging, the fringe pattern is influenced by the regular noises caused by the uniformly assembling chips. The noises cause the lower quality of wrapped phase and cannot correctly perform phase unwrapping. For denoising the regular noises of fringe pattern, the mean filter, median filter and Fast Fourier Transform filter were adopted to improve the quality of fringe pattern. The image processing results show that the FFT filter can decrease the influence of regular noises and increase the measurement precision.更多还原