【摘要】 用电子束蒸发沉积在K9玻璃基底上镀制HfO2薄膜,沉积温度为200℃,蒸发速率为0.03nm/s。由X射线衍射谱可知薄膜出现明显结晶,且为单斜相和正交相混合结构,其中单斜相占明显优势。用Jade5软件分析得到单斜相HfO2的晶格常数a,b,c以及晶格矢量a和c之间的夹角β。基于得到的晶格常数建立了单斜相HfO2薄膜的晶体结构模型。同时建立固态单斜相HfO2的晶体结构模型进行对比。通过密度泛函理论(DFT)框架下的平面超软赝势法,采用两种不同的交换关联函数:局域密度近似(LDA)中的CA-PZ和广义梯度近似(GGA)中的质子平衡方程(PBE),计算了薄膜态和固态单斜晶相HfO2的弹性刚度系数矩阵Cij和弹性柔度系数矩阵Sij,Reuss模型、Voigt模型和Hill理论下的体积模量和剪切模量,材料平均杨氏模量和泊松比。此外还计算得到薄膜态和固态单斜晶相HfO2在不同方向上的杨氏模量。更多还原

【Abstract】 HfO2 films are deposited by electron beam evaporation at a deposition rate of 0.03 nm/s and deposition temperature of 200 ℃ on K9 glass substrates.The films are observed to show a mixed structure of monoclinic and orthorhombic phase through X-ray diffraction and monoclinic phase is of obvious advantages.The structure parameters a,b,c and angel β of monoclinic HfO2 films are obtained using Jade5 software,based on which the crystal structure model is built.While solid crystal monoclinic HfO2 model is built to compare with the thin film one.Elastic stiffness constants of monoclinic HfO2 thin film and solid crystal are investigated using the plane waves ultrasoft pseudopotential technique based on the density functional theory(DFT) under two different exchange correlation functions of local density approximation(LDA) CA-PZ and generalized gradient approximation(GGA) PBE.Reuss,Voigt and Hill theories are used to estimate the bulk,shear and average Young′s moduli and Possion ratio for polycrystalline HfO2 thin film and solid crystal.In addition,the Young′s moduli in different orientations are also calculated.更多还原